Pure methylethoxydichlorosilane was obtained by vacuum distillation and its vapor pressure determined at pressures from (11.325 to 101.266) kPa with an inclined ebulliometer. The results were fit with an Antoine equation with parameters A = 9.74178, B = 1715.764, and C = −49 K. The correlation represented the measurements with differences of between (0.01 and 0.08) %. The molar evaporation enthalpy (ΔvapHm) of methylethoxydichlorosilane at temperatures in the range of (312.9 to 373.6) K was estimated from the Clausius−Clapeyron equation.