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Silane, (2-methyl-2,5-cyclohexadiene-1,4-diyl)bis[trimethyl-

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CAS: 18406-93-4
MF: C13H26Si2
MW: 238.51654
Synonyms: Silane, (2-methyl-2,5-cyclohexadiene-1,4-diyl)bis[trimethyl-
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Charles H. Winter

Wayne State University
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Thermal Atomic Layer Deposition of Titanium Films Using Titanium Tetrachloride and 2-Methyl-1,4-bis(trimethylsilyl)-2,5-cyclohexadiene or 1,4-Bis(trimethylsilyl)-1,4-dihydropyrazine
Co-reporter: Joseph P. Klesko, Christopher M. Thrush, and Charles H. Winter
pp: 4918
Publication Date(Web):July 15, 2015
DOI: 10.1021/acs.chemmater.5b01707