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TRIMETHYL-(4-TRIMETHYLSILYLPYRAZIN-1-YL)SILANE

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CAS: 31639-80-2
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Synonyms: TRIMETHYL-(4-TRIMETHYLSILYLPYRAZIN-1-YL)SILANE
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Charles H. Winter

Wayne State University
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Thermal Atomic Layer Deposition of Titanium Films Using Titanium Tetrachloride and 2-Methyl-1,4-bis(trimethylsilyl)-2,5-cyclohexadiene or 1,4-Bis(trimethylsilyl)-1,4-dihydropyrazine
Co-reporter: Joseph P. Klesko, Christopher M. Thrush, and Charles H. Winter
pp: 4918
Publication Date(Web):July 15, 2015
DOI: 10.1021/acs.chemmater.5b01707
Low Temperature Thermal Atomic Layer Deposition of Cobalt Metal Films
Co-reporter: Joseph P. Klesko, Marissa M. Kerrigan, and Charles H. Winter
pp: 700
Publication Date(Web):January 21, 2016
DOI: 10.1021/acs.chemmater.5b03504