A new micro-thermoelectric power generator module with high packing density of film thermoelectric legs has been proposed, in which a larger number of p-type and n-type thin-film thermoelectric legs are electrically connected in series. Based on the new module, two micro-thermoelectric power generators are fabricated by the electrochemical MEMS technology. The two micro-thermoelectric power generators containing 160 film thermocouples are all fabricated with a size of 25 mm (length) × 4 mm (width) × 1 mm (thickness), but the size of their thermoelectric legs are different, the size of the thermoelectric legs are 3.6 mm (length) × 0.4 mm (width) × 20 μm (thickness) and 3.6 mm (length) × 0.4 mm (width) × 50 μm (thickness), respectively. The open circuit voltage Vopen-circuit, the maximum output power and the corresponding power density of the two micro-thermoelectric power generators with a constant temperature difference ΔT=20K at room temperature is 630 mV, 35 μW, 357 μW/cm3 and 660 mV, 77 μW, 770 μW/cm3, respectively. The result shows that the thickness of the film thermoelectric materials have important influence on the performance of the micro-thermoelectric power generators.