Co-reporter: Ken Everaerts, Li Zeng, Jonathan W. Hennek, Diana I. Camacho, Deep Jariwala, Michael J. Bedzyk, Mark C. Hersam, and Tobin J. Marks
pp: 11884
Publication Date(Web):November 4, 2013
DOI: 10.1021/am403585n
Solution-processed amorphous oxide semiconductors (AOSs) are emerging as important electronic materials for displays and transparent electronics. We report here on the fabrication, microstructure, and performance characteristics of inkjet-printed, low-temperature combustion-processed, amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) grown on solution-processed hafnia self-assembled nanodielectrics (Hf-SANDs). TFT performance for devices processed below 300 °C includes >4× enhancement in electron mobility (μFE) on Hf-SAND versus SiO2 or ALD-HfO2 gate dielectrics, while other metrics such as subthreshold swing (SS), current on:off ratio (ION:IOFF), threshold voltage (Vth), and gate leakage current (Ig) are unchanged or enhanced. Thus, low voltage IGZO/SAND TFT operation (<2 V) is possible with ION:IOFF = 107, SS = 125 mV/dec, near-zero Vth, and large electron mobility, μFE(avg) = 20.6 ± 4.3 cm2 V–1 s–1, μFE(max) = 50 cm2 V–1 s–1. Furthermore, X-ray diffraction analysis indicates that the 300 °C IGZO combustion processing leaves the underlying Hf-SAND microstructure and capacitance intact. This work establishes the compatibility and advantages of all-solution, low-temperature fabrication of inkjet-printed, combustion-derived high-mobility IGZO TFTs integrated with self-assembled hybrid organic–inorganic nanodielectrics.Keywords: amorphous oxide field-effect transistor; electron mobility; hybrid dielectric; inkjet-printing; low-voltage electronics; thin-film transistor;